Thermal E-Beam Evaporator High Vacuum Coater
We currently have on hand a system we have on return from a university. It is a research system and has seen very little use. We can off this in a larger option for a production application when the time comes or if this used system is too small.The system we have now is set up with the following
Multi-pocket Ebeam System-Sweep Controls-Quartz Heaters-Two Resistance Sources-Shutters-Crystal Monitor Thickness Controller-Turbo Pumped-PLC Controlled-20 Inch Cuboid Vacuum Chamber
We Can also make any modifications if needed for your specific process.
SUPPLIES Diffusion Pump Oil
SUPPLIES Lubricants
SUPPLIES Sealants
Flanges/Fittings
Hardware
Used Denton vacuum coating system
Can Be Configured to Custom Specifications
Used Denton vacuum coating system
Can include the following all-new parts:
Mechanical pump package sized accordingly for fast pump down of system Cryo pump and compressor.
Polycold as required by the customer- need to know what size and model req’d
2- 4 pocket electron beam sources pocket sizes TBD 1 – 12kW high voltage power supply -19” rack mount
2- e-beam gun controllers- 19” rack mount
2- XY sweep controllers -19” rack mount
2 -auto indexers for pocket rotation- 19” rack mount
2 -1” baseplate bolt feedthrough kits Ion source with 19” rack-mounted controls
1 thermal source as required, with xfrm Vacuum gauging- 19” rack mount
Inficon IC6 deposition controller- 19” rack mount
IR substrate heaters 4000watts with xfmr.
Touch screen display control package
Flat planetary based on current customer design.
All electronics are mounted in a 19” rack where applicable
